Micro-/nano-positioningA micro-/nano-positioning system is a positioning devicesdevice that areis capable of producing displacement down to micro-/nano-meter resolution and accuracy,. A frequently used actuator in such micro-/nano-positioning applications areis the piezoelectric actuator, which, although precise, exhibitexhibits the unwanted phenomenon of hysteresis. Hysteresis is recognized as the main nonlinearity in the piezoelectric actuator and introduces severe control issues for accurate positioning. To compensate for hysteresis, an accurate model of the nonlinearity has to be identified. In this work, Aa discrete and a piecewise-continuous model, based on the fuzzy logic, will be identified. The general approach for control of hysteresis is to create the right inverse of the identified model. Based on the inverse of the developed model, feed-forward hysteresis compensation will be implemented. Also, the control systems design is a key enabling technology for many nano-science applications, and in particular micro-/ nano-positioning, for. For that, we will focus on achieving an accurate tracking performance by using an intelligent control methodology. The desired performance will be validated through simulation as well as experimentation. The experiments will be performed over the available equipment in the Control Laboratory of the Electrical Engineering department.